ALD features superb step coverage performance. The SEM images show

Decoding motor plans using a closed-loop ultrasonic brain–machine interface

Enhanced sunlight-absorption of Fe2O3 covered by PANI for the photodegradation of organic pollutants and antimicrobial inactivation - ScienceDirect

Growth of a Surface-Tethered, All-Carbon Backboned Fluoropolymer by Photoactivated Molecular Layer Deposition

Enhanced stability and activity towards photocatalytic CO2 reduction via supercycle ALD of Cu and TiO2 - ScienceDirect

Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels - Physical Chemistry Chemical Physics (RSC Publishing) DOI:10.1039/D0CP03358H

Carbon-Based Metallic Cobalt Pyrite Nanotubes as Stable Electrode Materials for Electrochemical Hydrogen Evolution

Vapor-Phase Atomic Layer Deposition of Co9S8 and Its Application for Supercapacitors

S. Kudelka's research works Infineon Technologies, Neubiberg and other places

ACS Symposium Series (ACS Publications)

PDF) Atomic Layer Deposition for advanced DRAM applications

Leakage current versus capacitance equivalent thickness for Al 2 O 3